MEMS Technology :
MEMS is a process technology used to create tiny integrated devices or systems that combine mechnical and electrical components. They are fabricated using integrated batch processing techniques and can range in size from few micrometers to millimeters. These devices/systems have ability to sense, control and actuate on the microscale. MEMS can be found a variety of applications in automotive,medical, electronic, communication, defence and Iots.
In MEMS technology subject we are going to study MEMS materials used for fabrication of different MEMS devices along with mechnical & thermal properties of materials, different fabriction methods, behaviour and characterization of MEMS devices .2D and 3D modelling & simulation of MEMS devices using Intellisense MEMS software.
We are conducting MEMS practicals for Final year students, Supported by Intellisense.
IntelliSuite - Industry Leading MEMS software (www.intellisense.com)